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KMID : 1039220190290020208
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Journal of Korean Society of Occupational and Environmental Hygiene
2019 Volume.29 No. 2 p.208 ~ p.216
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Design of local exhaust ventilation for preventive maintenance in semiconductor fabrication industry using CFD
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Hong Jwa-Ryung
Koo Jae-Han
Park Chang-Sup
Choi Kwang-Min
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Abstract
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Objective: The aim of this study is to control residual chemicals or by-products generated in chambers during preventive maintenance (PM) in the semiconductor manufacturing industry. We designed local exhaust ventilation using computational fluid dynamics (CFD).
Methods: The air flow characteristics and capture efficiency between rectangular and slot hoods were compared numerically. The software Fluent 18.1 was used to estimate uniform velocity distribution and capture efficiency for contaminants. A metal from group 15 in the periodic table was released at the bottom of the chamber to simulate emissions.
Results: The slot hood had a higher capture efficiency than a rectangular hood under the same conditions because the slot hood provided uniform air flow and higher face velocity. Also, there was no rotating swirl in the plenum for slot, that is why slot had better efficiency than rectangular even though they had similar face velocity. With less than 10 slots, the capture efficiencies for contaminants were nearly 95%. The optimum conditions for a hood to achieve high efficiency was 8 to 10 slots and a face velocity over 1 m/s.
Conclusions: Well-designed ventilation systems must consider both efficiency and convenience. For this study, a slot hood that had high capture efficiency and no work disturbance was designed. This will contribute to protection of the worker's health in a PM area and other areas as well. Also, this study confirms the possibility of the application CFD in the semiconductor fabrication industry.
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KEYWORD
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capture efficiency, computational fluid dynamics, hood, preventive maintenance, semiconductor industry
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